Modular.
Easy to Use.
High Resolution.
Friendly and Affordable.
Easy to use, Easy to learn. Modern and elegant user interface.
Modules. They help you grow with your needs
Supports modules for I, G and H line resists. Modules for Single Layer and Multi Layer Lithography.
2um Resolution.
Lithography of upto 2 micron resolution lines.
Flexible.
Robust Build.
Robust build
Built to best in class standards, with an all aluminium - precision machined body
Film and Quartz masks
Works well with both High resolution Quartz masks (2μm), as well as Affordable film masks (75μm))
LED based Source
Easy to maintain, does not require repeated callibration as required by conventional mask aligners.
Stage Modules
4S
Single layer photolithography. Accepts upto 4 inch wafers.
4M
Multi layer photolithography. Accepts upto 4 inch wafers.
Light Engines
365nm
LED based Light Engine. Low maintenance. Ideal for resists such as SU-8
405nm
LED based Light Engine. Low maintenance. Ideal for resists such as AZ-405
435nm
LED based Light Engine. Low maintenance. Ideal for resists such as AZ-333
Pricing
4S for Single Layer Lithography
$8,000
2 micron resolution
Ideal for Microfluidics
Compatible with I, G & H lines
Upgradable to Multi-Layer
incl. 365nm Light Engine
Book a Demo
4M for Multi Layer Lithography
$11,000
2 micron resolution
Ideal for Microfluidics
Compatible with I, G & H lines
Camera based Alignment
incl. 365nm Light Engine
Book a Demo
FAQ
Does Microfab work with SU-8?
Does Microfab come with training?
Do I need past experience in photolithography to use Microfab?
What exactly is innovative about Microfab?